Invention Application
- Patent Title: MICROSCOPE DEVICE AND DATA GENERATION METHOD USING MICROSCOPE
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Application No.: US17707096Application Date: 2022-03-29
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Publication No.: US20220244516A1Publication Date: 2022-08-04
- Inventor: Satoshi IKEDA , Naoki FUKUTAKE
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Main IPC: G02B21/08
- IPC: G02B21/08 ; G02B21/02 ; G02B21/36

Abstract:
A microscope device (1) comprises an illumination optical system (10,20) for illuminating a sample, a detection optical system (40) for receiving light from the sample, a detector (60) for detecting the light from the sample via the detection optical system and outputting a detection signal of the light, a data processor (66) for generating at least one of a three-dimensional refractive index distribution and a two-dimensional phase distribution in the sample based on the detection signal output from the detector, and a modulation element group that is provided at a position of a pupil or a position conjugate with the pupil in only the illumination optical system, and has light transmittance changing continuously within a surface of the pupil or within a surface conjugate with the pupil.
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