Invention Application
- Patent Title: Transient Digital Moire Phase-shifting Interferometric Measuring Device and Method for The Surface Shape of An Optical Element
-
Application No.: US17617315Application Date: 2021-02-08
-
Publication No.: US20220252391A1Publication Date: 2022-08-11
- Inventor: Qun HAO , Yao HU , Zhen WANG , Shaopu WANG
- Applicant: Beijing Institute of Technology
- Applicant Address: CN Beijing
- Assignee: Beijing Institute of Technology
- Current Assignee: Beijing Institute of Technology
- Current Assignee Address: CN Beijing
- Priority: CN202010091711.X 20200210
- International Application: PCT/CN2021/075983 WO 20210208
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G02B27/28 ; G02B5/30

Abstract:
A transient digital moire phase-shifting interferometric measuring device and method for a surface shape of an optical element solves a defect that an instantaneous vibration resistance needs to be sacrificed for a measurement range when using a two-step carrier splicing method, and expands the measurement range of a digital moire phase-shifting method while retaining instantaneous anti vibration characteristics of the digital moire phase-shifting method. The transient digital moire phase-shifting interferometric measuring device includes a light source, a beam splitter, a reference lens, a first polarization grating, a measured lens, a second polarization grating, a first imaging objective lens, a first camera, a second imaging objective lens and a second camera. Different carriers are loaded through a spectral performance of a polarization grating, and the polarization grating is used to separate two beams of an interference light, and two actual interference patterns are obtained at a same time.
Public/Granted literature
Information query