公开(公告)号：US20220252391A1

公开(公告)日：2022-08-11

申请号：US17617315

申请日：2021-02-08

Applicant: Beijing Institute of Technology

Inventor： Qun HAO ,  Yao HU ,  Zhen WANG ,  Shaopu WANG

IPC: G01B11/24 ,  G02B27/28 ,  G02B5/30

Abstract: A transient digital moire phase-shifting interferometric measuring device and method for a surface shape of an optical element solves a defect that an instantaneous vibration resistance needs to be sacrificed for a measurement range when using a two-step carrier splicing method, and expands the measurement range of a digital moire phase-shifting method while retaining instantaneous anti vibration characteristics of the digital moire phase-shifting method. The transient digital moire phase-shifting interferometric measuring device includes a light source, a beam splitter, a reference lens, a first polarization grating, a measured lens, a second polarization grating, a first imaging objective lens, a first camera, a second imaging objective lens and a second camera. Different carriers are loaded through a spectral performance of a polarization grating, and the polarization grating is used to separate two beams of an interference light, and two actual interference patterns are obtained at a same time.