Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE CONTAINING BRIDGES FOR ENHANCED STRUCTURAL SUPPORT AND METHODS OF FORMING THE SAME
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Application No.: US17510807Application Date: 2021-10-26
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Publication No.: US20220254728A1Publication Date: 2022-08-11
- Inventor: Koichi MATSUNO , Johann ALSMEIER
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L23/544
- IPC: H01L23/544 ; H01L27/11556 ; H01L27/11582

Abstract:
A three-dimensional memory device includes a first alternating stack of first word lines and first insulating layers, first memory stack structures vertically extending through the first alternating stack, a second alternating stack of second word lines and second insulating layers, second memory stack structures vertically extending through the second alternating stack, plural backside trench fill structures located between the first alternating stack and the second alternating stack, and a bridge region located between the plural backside trench fill structures and between the between the first alternating stack and the second alternating stack. At least one insulating layer extends continuously through the first alternating stack, the second alternating stack, and the bridge region.
Public/Granted literature
Information query
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