Invention Application
- Patent Title: EMBEDDED HEATER IN A PHASE CHANGE MEMORY MATERIAL
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Application No.: US17172118Application Date: 2021-02-10
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Publication No.: US20220254995A1Publication Date: 2022-08-11
- Inventor: JIN PING HAN , Philip Joseph Oldiges , ROBERT L. BRUCE , Ching-Tzu Chen
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A phase change memory cell for a semiconductor device that includes a heater element on a first conductive layer with a spacer surrounding sides of the heater element. The phase change memory cell includes a first dielectric layer on the conductive layer and on a bottom portion of the spacer surrounding the heater element and a second dielectric layer on the first dielectric layer surrounding a top portion of the heater element. The phase change memory cell includes a phase change material on a top surface of the heater element and on the second dielectric material.
Public/Granted literature
- US11910731B2 Embedded heater in a phase change memory material Public/Granted day:2024-02-20
Information query
IPC分类: