SEMICONDUCTOR ELEMENT CHARACTERISTIC VALUE ESTIMATION METHOD AND SEMICONDUCTOR ELEMENT CHARACTERISTIC VALUE ESTIMATION SYSTEM
Abstract:
A semiconductor element characteristic value estimation system is provided. The semiconductor element characteristic value estimation system includes an input portion, a database, and a processing portion. A first step list, a second step list, and a characteristic value of a semiconductor element are input to the input portion. The database has a function of storing a group of step lists and a group of characteristic values of semiconductor elements. The processing portion has a function of performing comparison between two step lists selected from the first step list and the group of step lists; a function of performing a test using two or more characteristic values of semiconductor elements selected from the characteristic value of the semiconductor element and the group of characteristic values of the semiconductor elements; a function of performing regression analysis of parameters for a step and two or more characteristic values of semiconductor elements selected from the characteristic value of the semiconductor element and the group of characteristic values of the semiconductor elements; and a function of estimating a characteristic value of a semiconductor element from the second step list.
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