Invention Application
- Patent Title: SEMICONDUCTOR ELEMENT CHARACTERISTIC VALUE ESTIMATION METHOD AND SEMICONDUCTOR ELEMENT CHARACTERISTIC VALUE ESTIMATION SYSTEM
-
Application No.: US17624936Application Date: 2020-06-30
-
Publication No.: US20220285231A1Publication Date: 2022-09-08
- Inventor: Junpei MOMO , Tatsuya OKANO
- Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Priority: JP2019-130206 20190712
- International Application: PCT/IB2020/056150 WO 20200630
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G05B19/418

Abstract:
A semiconductor element characteristic value estimation system is provided. The semiconductor element characteristic value estimation system includes an input portion, a database, and a processing portion. A first step list, a second step list, and a characteristic value of a semiconductor element are input to the input portion. The database has a function of storing a group of step lists and a group of characteristic values of semiconductor elements. The processing portion has a function of performing comparison between two step lists selected from the first step list and the group of step lists; a function of performing a test using two or more characteristic values of semiconductor elements selected from the characteristic value of the semiconductor element and the group of characteristic values of the semiconductor elements; a function of performing regression analysis of parameters for a step and two or more characteristic values of semiconductor elements selected from the characteristic value of the semiconductor element and the group of characteristic values of the semiconductor elements; and a function of estimating a characteristic value of a semiconductor element from the second step list.
Information query
IPC分类: