Invention Application
- Patent Title: TRENCH CAPACITOR DEVICE FOR SUPERCONDUCTING ELECTRONIC CIRCUIT AND SUPERCONDUCTING QUBIT DEVICE
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Application No.: US17682587Application Date: 2022-02-28
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Publication No.: US20220285482A1Publication Date: 2022-09-08
- Inventor: Anton Potocnik
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP21160148.9 20210302
- Main IPC: H01L49/02
- IPC: H01L49/02 ; G06N10/00 ; H01L27/18 ; H01L39/02

Abstract:
The disclosure relates to a trench capacitor device for a superconducting electronic circuit. The trench capacitor device includes a substrate, a first capacitor electrode, and a second capacitor electrode, each electrode including a superconductor and extending into the substrate. The first electrode is circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.
Information query
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