Methods of treating CMP wastewater comprising azoles are disclosed. The method includes providing the wastewater having a first azole concentration, introducing the wastewater to an inlet of a wastewater treatment system constructed and arranged to produce and introduce free radicals into the wastewater, and activating the wastewater treatment system to produce and introduce the free radicals into the wastewater in an amount sufficient to reduce the azole concentration in the wastewater and produce treated water having a second azole concentration, less than the first azole concentration. Methods of facilitating treatment of CMP wastewater comprising azoles by providing a water treatment system constructed and arranged to produce and introduce free radicals into the wastewater are disclosed.