Invention Application
- Patent Title: METHOD OF FABRICATING SEMICONDUCTOR DEVICE
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Application No.: US17830811Application Date: 2022-06-02
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Publication No.: US20220302017A1Publication Date: 2022-09-22
- Inventor: Hyun-Seung SONG , Kwang-Young LEE , Jonghyun LEE
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2020-0026158 20200302
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L27/11 ; H01L21/768

Abstract:
A semiconductor device includes a first active pattern on a substrate; a first gate electrode crossing the first active pattern; source/drain patterns in an upper portion of the first active pattern and at opposite sides, respectively, of the first gate electrode; a first gate capping pattern on the first gate electrode; an interlayer insulating layer on the source/drain patterns; first and second active contacts penetrating the interlayer insulating layer and being respectively connected to the pair of source/drain patterns; and a first interconnection layer on the first and second active contacts. The first interconnection layer may include a first insulating structure covering a top surface of the second active contact; and a first interconnection line covering a top surface of the first active contact and extending on the first insulating structure, and covering a top surface of the first gate capping pattern between the first and second active contacts.
Public/Granted literature
- US11923298B2 Method of fabricating semiconductor device Public/Granted day:2024-03-05
Information query
IPC分类: