Invention Application
- Patent Title: Absorbance analysis apparatus for DCR gas, absorbance analysis method for DCR gas, and absorbance analysis program recording medium on which program for DCR gas is recorded
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Application No.: US17695167Application Date: 2022-03-15
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Publication No.: US20220307977A1Publication Date: 2022-09-29
- Inventor: Yuichi FURUYA , Masayuki TANAKA , Yuhei SAKAGUCHI , Masakazu MINAMI , Toru SHIMIZU
- Applicant: Tokyo Electron Limited , HORIBA STEC, Co., Ltd.
- Applicant Address: JP Tokyo; JP Kyoto
- Assignee: Tokyo Electron Limited,HORIBA STEC, Co., Ltd.
- Current Assignee: Tokyo Electron Limited,HORIBA STEC, Co., Ltd.
- Current Assignee Address: JP Tokyo; JP Kyoto
- Priority: JP2021-049513 20210324
- Main IPC: G01N21/3518
- IPC: G01N21/3518

Abstract:
In order to provide an absorbance analysis apparatus for DCR gas that can measure a concentration of a DCR gas by separating absorbance of the DCR gas alone even in a mixed gas consisting of the DCR gas and CO gas whose absorption spectrum overlaps each other, the absorbance analysis apparatus for DCR gas comprises a DCR filter 31 that is configured to transmit a light in a first wavenumber domain including an absorbance peak of the DCR gas, a CO filter 32 that is configured to transmit a light in a second wavenumber domain that is different from the first wavenumber domain, and a DCR gas volume calculator 4 that is configured to calculate volume of the DCR gas based on a first absorbance measured by the light transmitted through the DCR filter 31 and a second absorbance measured by the light transmitted through the CO filter 32.
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