-
公开(公告)号：US12153455B2
公开(公告)日：2024-11-26
申请号：US17451981
申请日：2021-10-22
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Maximilian Gundlach , Ryan Owens , Thomas Hoke
Abstract: A flow rate ratio control device smoothly switches branches without generating abrupt changes in the flow rates of a fluid flowing therethrough. The device includes at least two branches from a main flow path, first and second fluid control valves each including a position sensor for a valve body, a storage unit that stores reference positions of the valve bodies in order to divide the fluid flowing into the branches at predetermined ratios, and a control unit that controls the ratios of the branches by performing position control to place the valve body of the first valve in the reference position, and by performing flow rate control to set the flow rate of the second valve to a target flow rate. When the valve body of the second valve reaches the reference position, the control unit switches the position control and flow rate control between the valves.
-
公开(公告)号：US20240360918A1
公开(公告)日：2024-10-31
申请号：US18610819
申请日：2024-03-20
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Noriaki KONDO , Hideaki MIYAMOTO , Naoya TASAKA
IPC: F16K31/524 , F16K7/14 , F16K31/00
CPC classification number: F16K31/52491 , F16K31/007 , F16K7/14
Abstract: A fluid control valve improves position stability of a displacement expanding mechanism, and includes an actuator for driving the valve body, and the displacement expanding mechanism interposed between the valve body and the actuator to expand displacement of the actuator and transmit the displacement to the valve body. The displacement expanding mechanism includes an input member that is displaced upon receiving a driving force from the actuator, and a plurality of lever members that are disposed around a central axis of the valve body between the input member and the valve body, and expand displacement of the input member and transmit the displacement to the valve body. The plurality of lever members each have a contact surface with which the input member comes into contact to serve as a force point portion. The contact surface forms a downward gradient toward the central axis of the valve body.
-
公开(公告)号：US11867308B2
公开(公告)日：2024-01-09
申请号：US16689878
申请日：2019-11-20
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Shigeyuki Hayashi , Tadahiro Yasuda
CPC classification number: F16K31/007 , H02N2/001 , H10N30/20 , H10N30/50 , H10N30/802 , H10N30/853
Abstract: In order to provide a piezoelectric actuator and a fluid control valve that can vaporize a liquid material more effectively than a conventional arrangement, the piezoelectric actuator comprises a piezoelectric stack wherein a piezoelectric ceramic layer and an electrode layer are alternately laminated, a DC voltage application circuit that displaces the piezoelectric stack by applying a DC voltage to at least a part or whole of the piezoelectric stack, and a vibration voltage application circuit that vibrates the piezoelectric stack by applying a voltage having a predetermined frequency or above to at least a part or whole of the piezoelectric stack.
-
公开(公告)号：US11841720B2
公开(公告)日：2023-12-12
申请号：US18051637
申请日：2022-11-01
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Kazuya Tokunaga
CPC classification number: G05D7/0647 , F16K31/007 , F16K31/02 , G01F1/34 , G01F15/005 , G05B11/42 , G05D7/0623 , G05D7/0635 , G05D7/0641
Abstract: Provided is a flow rate controller. The flow rate controller calculates a resistor flow rate that is a flow rate of a fluid flowing through a fluid resistor, on the basis of a first measured pressure measured by a first pressure sensor and a second measured pressure measured by a second pressure sensor; controls a second valve on the basis of a deviation of the resistor flow rate from the set flow rate; outputs a first set pressure that is a target of a pressure upstream of the fluid resistor, on the basis of the set flow rate and a second set pressure which is a target of a pressure downstream of the fluid resistor and to which a constant value is set; and controls the first valve on the basis of a deviation of the first measured pressure from the first set pressure.
-
公开(公告)号：US11761547B1
公开(公告)日：2023-09-19
申请号：US17658431
申请日：2022-04-07
Applicant: HORIBA STEC, Co., Ltd.
Inventor： John T. Dick , David Daniel Webster
CPC classification number: F16K7/14 , F16K1/425 , F16K11/022 , F16K27/0236
Abstract: A valve orifice insert has a stepped-shaped wall including a first tubular section and a second tubular section having a smaller outer dimension than the first tubular section, and a lip structure protruding axially and including a planar valve seat surface. The first tubular section and the second tubular section being are joined by a step structure. At least one circumferential protrusion extends radially outward a predetermined distance from an outer surface of the first tubular section or an outer surface of the second tubular section to form an interference fit with the step-shaped opening when the valve orifice insert is fitted into the step-shaped opening.
-
Patent Agency Ranking
公开(公告)号：US20230229177A1
公开(公告)日：2023-07-20
申请号：US18147199
申请日：2022-12-28
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Kentaro NAGAI , Kazuhiro MATSUURA , Yoshiki MIYATA , Sota MATSUMOTO , Yosuke HISAMORI
CPC classification number: G05D7/0635 , F16K37/005
Abstract: A fluid control device includes a fluid resistance element provided to a channel, an upstream pressure sensor configured to detect an upstream pressure of the fluid resistance element, a downstream pressure sensor configured to detect a downstream pressure of the fluid resistance element, a flow rate calculating unit configured to calculate a flow rate flowing through the channel based on the upstream and downstream pressures, a valve provided upstream of the upstream pressure sensor or downstream of the downstream pressure sensor, and a valve control unit configured to control the valve based on the calculated flow rate. When the valve is fully closed, the flow rate calculating unit is configured to calculate the flow rate by switching a first flow rate calculation formula that is used when the valve is open, to a second flow rate calculation formula that is different from the first flow rate calculation formula.
-
公开(公告)号：US20230220857A1
公开(公告)日：2023-07-13
申请号：US17647591
申请日：2022-01-10
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Andrew Wayne Price , Era Benjamin Hartman , Esteban Daniel Gonzalez , William Wylie White , Virginia Ann Miller
Abstract: A flow restrictor is provided, comprising a first sheet including a flow passage, and a second sheet stacked on the first sheet. A hole is provided in a center of the second sheet. The flow passage includes a groove cut into a surface of the first sheet that communicates with an expansion zone at a peripheral area of the first sheet. A peripheral edge of the second sheet contacts the first sheet in the expansion zone between an inner diameter and an outer diameter of the expansion zone.
-
公开(公告)号：US11698649B2
公开(公告)日：2023-07-11
申请号：US17409041
申请日：2021-08-23
Applicant: HORIBA STEC, CO., LTD.
Inventor： Toru Shimizu
CPC classification number: G05D11/138 , C23C16/448 , G05D7/0623 , G05D11/132 , G05D16/2013 , G05D21/02 , H01L21/67253 , H01L21/67034
Abstract: Provided is a concentration control module that improve responsiveness of concentration control of a vaporization system, and is used in a vaporization system. The concentration control module includes a concentration measuring part configured to measure a concentration of a source gas; a valve provided in a lead-out pipe configured to lead out the source gas from the tank; a pressure target value calculating part configured to calculate a pressure target value inside the tank by using a concentration target value of the source gas, and a concentration measured value of the concentration measuring part; a delay filter configured to generate a pressure control value by applying a predetermined time delay to the pressure target value obtained by the pressure target value calculating part; and a valve control part configured to feedback-control the valve by using a deviation between the pressure control value obtained by the delay filter, and a pressure inside the tank.
-
公开(公告)号：US20230140776A1
公开(公告)日：2023-05-04
申请号：US18047577
申请日：2022-10-18
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Kenichi OE , Daichi KUNITA , Kazuya SHAKUDO
Abstract: A fluid control device includes a body inside which is formed a flow path, a fluid control valve that is mounted on the body and controls a fluid flowing through the flow path, and a casing that is mounted on the body in such a way as to house the fluid control valve. A sloping surface that slopes towards the body is formed on a top surface of the casing, which is a surface facing towards an opposite side from the body.
-
公开(公告)号：US11631596B2
公开(公告)日：2023-04-18
申请号：US16807722
申请日：2020-03-03
Applicant: HORIBA STEC, Co., Ltd.
Inventor： Toru Shimizu , Masakazu Minami
IPC: C23C16/448 , H01L21/67 , G05D11/13
Abstract: In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.
-
-
-
-
-
-
-
-
-
Search Results
338
records
(took 0.018 seconds)
