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公开(公告)号：US20230140776A1
公开(公告)日：2023-05-04
申请号：US18047577
申请日：2022-10-18
发明人： Kenichi OE , Daichi KUNITA , Kazuya SHAKUDO
摘要： A fluid control device includes a body inside which is formed a flow path, a fluid control valve that is mounted on the body and controls a fluid flowing through the flow path, and a casing that is mounted on the body in such a way as to house the fluid control valve. A sloping surface that slopes towards the body is formed on a top surface of the casing, which is a surface facing towards an opposite side from the body.
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公开(公告)号：US11631596B2
公开(公告)日：2023-04-18
申请号：US16807722
申请日：2020-03-03
发明人： Toru Shimizu , Masakazu Minami
IPC分类号： C23C16/448 , H01L21/67 , G05D11/13
摘要： In order to provide a concentration control apparatus that, without adding any new sensors or the like, makes it possible to accurately estimate a quantity of source consumed inside a vaporization tank, and to perform highly accurate concentration control in accordance with the remaining quantity of source, there is provided a concentration control apparatus that, in a vaporizer that is equipped with at least a vaporization tank containing a liquid or solid source, a carrier gas supply path that supplies a carrier gas to the vaporization tank, and a source gas extraction path along which flows a source gas which is created by vaporizing the source and is then extracted from the vaporization tank, controls a concentration of the source gas and includes a concentration monitor that is provided on the source gas extraction path, and outputs output signals in accordance with a concentration of the source gas.
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公开(公告)号：US11609146B2
公开(公告)日：2023-03-21
申请号：US16815909
申请日：2020-03-11
发明人： Sota Matsumoto , Kentaro Nagai , Yuko Imasato
摘要： In order to accurately judge whether or not there is a seat leakage in the first valve and the second valve in a short period of time, a fluid control apparatus comprises a fluid resistor arranged in a flow channel, a first valve arranged upstream of the fluid resistor, a first pressure sensor that measures a pressure in a first volume between the first valve and the fluid resistor in the flow channel, a second valve arranged downstream of the fluid resistor, a second pressure sensor that measures a pressure in a second volume between the fluid resistor and the second valve, a valve controller that controls the first or second valve, and a seat leakage judging part that judges whether or not there is a seat leakage in the valve valves based on the pressure sensors in a state where the valves are fully closed.
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公开(公告)号：US11608910B2
公开(公告)日：2023-03-21
申请号：US17078343
申请日：2020-10-23
发明人： Jeffrey Ransdell
摘要： In order to provide a piezo valve in which it is possible to accurately predict the remaining lifespan of a piezo actuator, there are provided a valve seat, a valve body that is able to move between a fully closed position in contact with the valve seat and a fully open position, a piezo actuator that drives the valve body, a drive circuit that receives an input signal, and outputs to the piezo actuator a corresponding drive voltage, and a leakage current detector that, when the drive circuit outputs a voltage equal to or greater than a maximum rated voltage that drives the valve body to the fully closed/open position, detects leakage current from the piezo actuator. When the leakage current is detected or in a state immediately prior to detection, a fluid is flowing between the valve seat and the valve body.
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公开(公告)号：US11537150B2
公开(公告)日：2022-12-27
申请号：US17210806
申请日：2021-03-24
发明人： Kazuya Shakudo
摘要： A fluid control apparatus includes a block elongated in a longitudinal direction and having a predetermined width, an internal flow channel formed inside the block so as to extend in the longitudinal direction, a first control valve mounted on the block, a second control valve mounted on the block at a position downstream of the first control valve. In the fluid control apparatus, the internal flow channel has a first outflow channel connected to a first outlet of the first control valve through which a fluid flows out thereof and also has a second inflow channel connected to a second inlet of the second control valve through which the fluid flows thereinto. In addition, the first outflow channel and the second inflow channel are disposed so as to overlap each other at one point as viewed in the width direction through the block.
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公开(公告)号：US11519805B2
公开(公告)日：2022-12-06
申请号：US17178621
申请日：2021-02-18
发明人： Junya Nakai , Sotaro Kishida
摘要： In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.
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公开(公告)号：US11519070B2
公开(公告)日：2022-12-06
申请号：US16778503
申请日：2020-01-31
发明人： Toru Shimizu , Masakazu Minami
IPC分类号： C23C16/52
摘要： In order to inhibit overshoot in the concentration of a source gas immediately after a gas supply period starts, there is provided a vaporization device that is equipped with a vaporization tank that holds a liquid or a solid source, a carrier gas supply path that supplies carrier gas to the vaporization tank, a source gas extraction path along which flows a source gas which is obtained by vaporizing the source and which is extracted from the vaporization tank, a concentration monitor that is provided on the source gas extraction path, and a concentration control mechanism that is provided with a fluid controller which controls a concentration of the source gas extracted from the source gas extraction path. This vaporization device alternates between supplying the source gas and stopping the supply of the source gas.
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公开(公告)号：US11493443B2
公开(公告)日：2022-11-08
申请号：US16849381
申请日：2020-04-15
发明人： Toru Shimizu , Yuhei Sakaguchi , Masakazu Minami
IPC分类号： G01N21/61
摘要： In order to make it possible to conduct a zero calibration even though an interference gas exists in a measurement area of a detector, a light absorbance analysis apparatus includes a detector that detects an intensity of light that transmits a gas, a total pressure sensor that measures a total pressure of the gas, an absorbance calculating part that calculates an absorbance based on an output value of the detector and a previously set zero reference value, a partial pressure—absorbance relation storing part that stores a partial pressure—absorbance relational data that indicates a relationship between a partial pressure of an interference gas that exists in a measurement area of the detector and an absorbance calculated by the absorbance calculating part, and a partial pressure calculating part that calculates an interference gas partial pressure as a partial pressure of the interference gas.
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公开(公告)号：US11454993B2
公开(公告)日：2022-09-27
申请号：US17444316
申请日：2021-08-03
发明人： Kazuya Tokunaga
摘要： A flow rate control apparatus calculates a resistance flow rate, which is a flow rate of a fluid flowing through the fluid resistor, based on a first pressure measured by a first pressure sensor and a second pressure measured by a second pressure sensor, converts the resistance flow rate to a first valve flow rate, which is the flow rate of the fluid passing through a first valve, based on the first pressure, converts the resistance flow rate to a second valve flow rate, which is the flow rate of the fluid passing through a second valve, based on the second pressure, controls the first valve so that the deviation between a first set flow rate and the first valve flow rate becomes small, and controls the second valve so that the deviation between a second set flow rate and the second valve flow rate becomes small.
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公开(公告)号：US20220082416A1
公开(公告)日：2022-03-17
申请号：US17447217
申请日：2021-09-09
摘要： A pressure type flowmeter includes a fluid resistance element provided in a flow path through which fluid flows, and in which a resistance flow path communicating with the flow path is formed, an upstream-side pressure sensor that detects upstream-side pressure of the fluid resistance element, and a downstream-side pressure sensor that detects downstream-side pressure of the fluid resistance element, in which the fluid resistance element is sandwiched and fixed by a pair of sandwiching components sealing components having a sheet-like shape are provided between the fluid resistance element and the sandwiching components and protrusions that partially press the sealing components are formed on at least one of the fluid resistance element and the sandwiching components.
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