Invention Application
- Patent Title: LEVER BASED DIFFERENTIAL CAPACITIVE STRAIN GAUGE WITH ACCELERATION REJECTION
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Application No.: US17238051Application Date: 2021-04-22
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Publication No.: US20220341795A1Publication Date: 2022-10-27
- Inventor: Erdinc Tatar , William A. Clark
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Wilmington
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Wilmington
- Main IPC: G01L1/14
- IPC: G01L1/14

Abstract:
Microelectromechanical systems (MEMS) capacitive strain gauge sensors are described. The strain gauge sensors include a lever configured to mechanically amplify a strain response. In some embodiments, an anchored beam is coupled to the effort arm of the lever and a movable sensing finger to the resistance arm. The effort arm may be shorter than the resistance arm, thus providing a mechanical amplification.
Public/Granted literature
- US12000739B2 Lever based differential capacitive strain gauge with acceleration rejection Public/Granted day:2024-06-04
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