Invention Application
- Patent Title: MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND IMPROVED OPENING ANGLE
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Application No.: US17727117Application Date: 2022-04-22
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Publication No.: US20220342203A1Publication Date: 2022-10-27
- Inventor: Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza (MB)
- Priority: IT102021000010616 20210427
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G01L1/18

Abstract:
A microelectromechanical mirror device includes a fixed structure defining a cavity, a tiltable structure elastically suspended above the cavity and carrying a reflecting surface, and having a main extension in a horizontal plane. A first pair of driving arms carry respective piezoelectric material regions that are biased to cause a rotation of the tiltable structure around a first rotation axis parallel to a first horizontal axis of the horizontal plane, and elastically coupled to the tiltable structure. Elastic suspension elements that couple the tiltable structure to the fixed structure at the first rotation axis are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, and further extend between the tiltable structure and the fixed structure. The elastic suspension elements have an asymmetrical arrangement on opposite sides of the tiltable structure along the first rotation axis.
Public/Granted literature
- US12270990B2 Microelectromechanical mirror device with piezoelectric actuation and improved opening angle Public/Granted day:2025-04-08
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