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1.发明申请公开(公告)号：US20220342203A1
公开(公告)日：2022-10-27
申请号：US17727117
申请日：2022-04-22
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical mirror device includes a fixed structure defining a cavity, a tiltable structure elastically suspended above the cavity and carrying a reflecting surface, and having a main extension in a horizontal plane. A first pair of driving arms carry respective piezoelectric material regions that are biased to cause a rotation of the tiltable structure around a first rotation axis parallel to a first horizontal axis of the horizontal plane, and elastically coupled to the tiltable structure. Elastic suspension elements that couple the tiltable structure to the fixed structure at the first rotation axis are stiff with respect to movements out of the horizontal plane and yielding with respect to torsion around the first rotation axis, and further extend between the tiltable structure and the fixed structure. The elastic suspension elements have an asymmetrical arrangement on opposite sides of the tiltable structure along the first rotation axis.
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公开(公告)号：US20220119245A1
公开(公告)日：2022-04-21
申请号：US17499297
申请日：2021-10-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Lorenzo VINCIGUERRA , Roberto CARMINATI , Massimiliano MERLI
Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.
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公开(公告)号：US20240425359A1
公开(公告)日：2024-12-26
申请号：US18828564
申请日：2024-09-09
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Lorenzo VINCIGUERRA , Roberto CARMINATI , Massimiliano MERLI
Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure and communicates laterally with the pass-through cavity.
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公开(公告)号：US20230288696A1
公开(公告)日：2023-09-14
申请号：US18118333
申请日：2023-03-07
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
CPC classification number: G02B26/0858 , B81B3/0062 , G03B21/008 , B81B2201/042
Abstract: A microelectromechanical-mirror device has a fixed structure defining an external frame delimiting a cavity, an internal frame arranged above the cavity and defining a window, and a tiltable structure with a reflective surface and arranged in the window. Elastically coupled to the internal frame by first and second coupling elastic elements. An actuation structure is coupled to the internal frame to cause the rotation of the tiltable structure around first and second axes. The actuation structure has a first pair of driving arms, elastically coupled to the internal frame and carrying piezoelectric material regions to cause rotation of the tiltable structure around the first axis, and a further pair of driving arms carrying piezoelectric material regions to cause rotation of the tiltable structure around the second axis and interposed between the fixed structure and the internal frame, to which they are elastically coupled by first and second suspension elastic elements.
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公开(公告)号：US20230251556A1
公开(公告)日：2023-08-10
申请号：US18134671
申请日：2023-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058 , B81B2201/032
Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.
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Patent Agency Ranking
6.发明申请公开(公告)号：US20190196177A1
公开(公告)日：2019-06-27
申请号：US16222027
申请日：2018-12-17
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto CARMINATI , Massimiliano MERLI , Nicolo' BONI
CPC classification number: G02B26/0858 , B81B3/0083 , G02B26/101 , G02B26/105 , H04N1/029 , H04N9/3173
Abstract: A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.
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公开(公告)号：US20240019688A1
公开(公告)日：2024-01-18
申请号：US18220554
申请日：2023-07-11
Applicant: STMicroelectronics S.r.l.
Inventor： Massimiliano MERLI , Roberto CARMINATI , Nicolo' BONI , Sonia COSTANTINI , Carlo Luigi PRELINI
CPC classification number: G02B26/0858 , B81B3/007 , B81C1/00658 , B81B2201/042
Abstract: Disclosed herein is a micro-electro-mechanical mirror device having a fixed structure defining an external frame delimiting a cavity, a tiltable structure extending into the cavity, a reflecting surface carried by the tiltable structure and having a main extension in a horizontal plane, and an actuation structure coupled between the tiltable structure and the fixed structure. The actuation structure is formed by a first pair of actuation arms causing rotation of the tiltable structure around a first axis parallel to the horizontal plane. The actuation arms are elastically coupled to the tiltable structure through elastic coupling elements and are each formed by a bearing structure and a piezoelectric structure. The bearing structure of each actuation arm is formed by a soft region of a first material and the elastic coupling elements are formed by a bearing layer of a second material, the second material having greater stiffness than the first material.
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8.发明公开公开(公告)号：US20230324674A1
公开(公告)日：2023-10-12
申请号：US18131085
申请日：2023-04-05
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI , Carlo Luigi PRELINI , Tarek AFIFI AFIFI
CPC classification number: G02B26/0858 , B81B3/007 , B81C1/00658 , B81B2201/042
Abstract: A microelectromechanical mirror device has, in a die of semiconductor material: a fixed structure defining a cavity; a tiltable structure carrying a reflecting region, elastically suspended above the cavity and having a main extension in a horizontal plane; at least one first pair of driving arms, carrying respective piezoelectric structures which can be biased to generate a driving force that causes rotation of the tiltable structure about a rotation axis parallel to a first horizontal axis of the horizontal plane; elastic suspension elements, which elastically couple the tiltable structure to the fixed structure at the rotation axis and are rigid to movements out of the horizontal plane and compliant to torsion about the rotation axis. In particular, the driving arms of the first pair are magnetically coupled to the tiltable structure to cause its rotation about the rotation axis by magnetic interaction, following biasing of the respective piezoelectric structures.
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公开(公告)号：US20220099959A1
公开(公告)日：2022-03-31
申请号：US17465329
申请日：2021-09-02
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
Abstract: A microelectromechanical mirror device includes a supporting frame of semiconductor material and a plate of semiconductor material. The plate is connected to the supporting frame so as to be orientable around at least one rotation axis. A reflective layer is arranged on a first region of the plate. A piezoelectric actuation structure extends on a second region of the plate adjacent to the reflective layer. The piezoelectric actuation structure is configured to apply forces such as to modify a curvature of the plate.
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公开(公告)号：US20210351338A1
公开(公告)日：2021-11-11
申请号：US17137220
申请日：2020-12-29
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Domenico GIUSTI , Carlo Luigi PRELINI , Marco FERRERA , Carla Maria LAZZARI , Luca SEGHIZZI , Nicolo' BONI , Roberto CARMINATI , Fabio QUAGLIA
Abstract: The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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