- 专利标题： SYNTHETIC QUARTZ GLASS CAVITY MEMBER, SYNTHETIC QUARTZ GLASS CAVITY LID, OPTICAL DEVICE PACKAGE, AND MAKING METHODS
-
申请号： US17866230申请日： 2022-07-15
-
公开(公告)号： US20220352427A1公开(公告)日： 2022-11-03
- 发明人: Harunobu Matsui , Daijitsu Harada , Daiyu OKAFUJI , Hiroyuki YAMAZAKI , Masaki TAKEUCHI
- 申请人： Shin-Etsu Chemical Co., Ltd.
- 申请人地址： JP Tokyo
- 专利权人： Shin-Etsu Chemical Co., Ltd.
- 当前专利权人： Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2018-137374 20180723
- 主分类号： H01L33/48
- IPC分类号： H01L33/48 ; B32B7/12 ; B32B17/00 ; C03C27/10 ; H01L31/0203 ; H01L31/18
摘要：
A synthetic quartz glass cavity member (1) is bonded to a substrate (6) having an optical device (7) mounted thereon such that the device may be accommodated in the cavity member. The cavity member (1) has an inside surface consisting of a top surface (2a) opposed to the device (7) and a side surface (3a). The top surface (2a) is a mirror surface and the side surface (3a) is a rough surface.
公开/授权文献
信息查询
IPC分类:
