METHOD FOR PRODUCING ORGANOMETALLIC COMPOUND AND THIN FILM FABRICATED USING ORGANOMETALLIC COMPOUND OBTAINED THEREBY
摘要:
The present invention relates to a method for producing a high yield of an organometallic compound including a step of allowing a metal hexacarbonyl compound to react with a hexahydro-1,3,5-triazine compound, and a thin film having excellent properties, fabricated by depositing the produced organometallic compound.
信息查询
0/0