A vacuum chamber module and an apparatus are disclosed. The vacuum chamber module comprises: a pump wall defining a recess shaped to receive a multi-stage vacuum pump; a plurality of vacuum chambers, each vacuum chamber being configured to be pumped by a respective stage of the multi-stage vacuum pump, each vacuum chamber being defined at least partially by a portion of the pump wall, each vacuum chamber having an pumping port located at a different circumferential position on the pump wall for fluid communication with the respective stage of the multi-stage vacuum pump. In this way, a module is provided which shares components, with the multi-stage pump at least partially accommodated within space otherwise occupied by the vacuum chambers and with the vacuum chambers located around the pump wall, which provides for a simpler and more compact arrangement.