Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US17771565Application Date: 2020-10-19
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Publication No.: US20220367450A1Publication Date: 2022-11-17
- Inventor: Shunpei YAMAZAKI , Shuhei NAGATSUKA , Takuya KAWATA , Ryota HODO
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Priority: JP2019-200259 20191101,JP2020-068169 20200406
- International Application: PCT/IB2020/059796 WO 20201019
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L27/06 ; H01L27/108 ; H01L27/1156 ; H01L29/786 ; H01L29/792

Abstract:
A semiconductor device with a small variation in characteristics is provided. The semiconductor device includes a first insulator, a transistor over the first insulator, a second insulator over the transistor, a third insulator over the second insulator, a fourth insulator over the third insulator, and an opening region. The opening region includes the second insulator, the third insulator over the second insulator, and the fourth insulator over the third insulator. The third insulator includes an opening reaching the second insulator. The fourth insulator is in contact with a top surface of the second insulator inside the opening.
Information query
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