Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
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Application No.: US17671533Application Date: 2022-02-14
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Publication No.: US20220367514A1Publication Date: 2022-11-17
- Inventor: HYUNCHEOL KIM , YONGSEOK KIM , DONGSOO WOO , SUNGWON YOO , KYUNGHWAN LEE , JAEHO HONG
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0061291 20210512
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587

Abstract:
A semiconductor memory device may include a stack including word lines and interlayer insulating patterns alternatingly stacked on a substrate, the word lines being extended in a first direction parallel to a top surface of the substrate, semiconductor patterns crossing the word lines and having a long axis extended in a second direction parallel to the top surface of the substrate, data storage patterns respectively interposed between the semiconductor patterns and the word lines, the data storage patterns including a ferroelectric material, bit lines extended in a third direction perpendicular to the top surface of the substrate and spaced apart from each other in the first direction, each of the bit lines being in contact with first side surfaces of the semiconductor patterns spaced apart from each other in the third direction, and a source line in contact with second side surfaces of the semiconductor patterns.
Information query
IPC分类: