Invention Application
- Patent Title: MASK ASSEMBLY AND APPARATUS FOR MANUFACTURING DISPLAY DEVICE
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Application No.: US17702280Application Date: 2022-03-23
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Publication No.: US20220367841A1Publication Date: 2022-11-17
- Inventor: Sanghoon KIM , Jongsung PARK , Hongkyun AHN , Sangshin LEE , Minji JANG
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2021-0060743 20210511
- Main IPC: H01L51/56
- IPC: H01L51/56 ; C23C14/04 ; C23C16/04

Abstract:
A mask assembly includes a first mask area including first opening areas, and a second mask area including second opening areas having centers located at vertices of virtual squares in a row direction and a column direction, half-etching areas having centers located at centers of the virtual squares, and a non-etching area surrounding the second opening areas and the half-etching areas. Each of the second opening areas includes a base portion and at least one protrusion portion protruding from the base portion.
Public/Granted literature
- US12178112B2 Mask assembly and apparatus for manufacturing display device Public/Granted day:2024-12-24
Information query
IPC分类: