公开(公告)号：US20220367841A1

公开(公告)日：2022-11-17

申请号：US17702280

申请日：2022-03-23

Applicant: Samsung Display Co., Ltd.

Inventor： Sanghoon KIM ,  Jongsung PARK ,  Hongkyun AHN ,  Sangshin LEE ,  Minji JANG

IPC: H01L51/56 ,  C23C14/04 ,  C23C16/04

Abstract: A mask assembly includes a first mask area including first opening areas, and a second mask area including second opening areas having centers located at vertices of virtual squares in a row direction and a column direction, half-etching areas having centers located at centers of the virtual squares, and a non-etching area surrounding the second opening areas and the half-etching areas. Each of the second opening areas includes a base portion and at least one protrusion portion protruding from the base portion.