Invention Application
- Patent Title: IN-LINE MANUFACTURING APPARATUS
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Application No.: US17680633Application Date: 2022-02-25
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Publication No.: US20220371138A1Publication Date: 2022-11-24
- Inventor: Doo Seon YU , Gyung Min BAEK , Hyun Eok SHIN , You Jong LEE , Myung Soo HUH
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Priority: KR10-2021-0065373 20210521
- Main IPC: B23Q7/14
- IPC: B23Q7/14 ; B23Q11/10

Abstract:
An in-line manufacturing apparatus includes a carrier that transports a substrate, a plurality of process chambers subjected to a manufacturing process on the substrate transported through the carrier, and a cooling part disposed adjacent to the carrier and movable with the carrier.
Information query