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公开(公告)号：US20240339364A1
公开(公告)日：2024-10-10
申请号：US18517343
申请日：2023-11-22
Applicant: Samsung Display Co., LTD.
Inventor： Hee Jung LEE , Hong Gi MIN , Jong Sung KIM , Sang Jin LEE , Myung Soo HUH
CPC classification number: H01L22/20 , H01L33/005
Abstract: An apparatus for fabricating a display panel includes a loading plate on which a fabrication substrate is loaded, a plurality of optical microscopes that captures the fabrication substrate and alignment marks of the fabrication substrate, a gripper driver that aligns the fabrication substrate by adjusting a gap between gripper units and rotating the gripper units; and a substrate alignment controller that calculates an amount of rotation correction for the gripper units based on a deviated angle of the fabrication substrate to supply it to the gripper driver, calculates a gripper gap setting value for adjusting the gap between the gripper units using a residual of the aligned fabrication substrate, and provides the gripper gap setting value to the gripper driver.
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公开(公告)号：US20230265558A1
公开(公告)日：2023-08-24
申请号：US17993147
申请日：2022-11-23
Applicant: Samsung Display Co., LTD.
Inventor： Choel Min JANG , Myung Soo HUH , Jung Gon KIM , Min Gyu PARK , Eun JUNG
IPC: C23C16/455
CPC classification number: C23C16/45504 , C23C16/45544
Abstract: An atomic layer deposition apparatus includes a substrate support which supports a substrate; a process module on the substrate support; a first gas pipe which supplies a first gas to the process module; a second gas pipe which supplies a second gas to the process module; and an exhaust part which discharges the first and second gases supplied to the process module. The process module includes: a first gas supply flow path portion connected to the first gas pipe; a second gas supply flow path portion under the first gas supply flow path portion and connected to the second gas pipe; and a gas exhaust flow path portion connected to the exhaust part. The gas exhaust flow path is spaced apart from the first and second gas supply flow path portions with the substrate therebetween, and the first and second gases pass through a process area in a laminar flow.
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公开(公告)号：US20210300026A1
公开(公告)日：2021-09-30
申请号：US17150521
申请日：2021-01-15
Applicant: Samsung Display Co., LTD.
Inventor： Futoshi YOSHIDA , Cheong Wan MIN , Min A HAN , Jae Bum PAHK , Jeong Ho YI , Heung Cheol JEONG , Myung Soo HUH
Abstract: An inkjet print apparatus includes a print head discharging ink onto a substrate, the print head including a first heater; a reservoir storing the ink; a first pipe supplying the ink to the reservoir; a second pipe collecting surplus ink; a mixing unit located on the first pipe and mixing the ink; a pump located on the second pipe and pressurizing and supplying the surplus ink to the reservoir; a temperature sensor located between the mixing unit and the print head and sensing a temperature of the ink; and a controller controlling a temperature of at least one of the first heater and the second heater in response to information received from the temperature sensor. The print head includes a heat insulator blocking heat emitted from the first heater between the substrate and the first heater.
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4.发明申请公开(公告)号：US20190115409A1
公开(公告)日：2019-04-18
申请号：US16132031
申请日：2018-09-14
Applicant: Samsung Display Co., Ltd.
Inventor： Myung Soo HUH , Dong Kyun KO , Sung Chul KIM , Woo Jin KIM , Cheol Lae ROH , Keun Hee PARK
Abstract: A method of manufacturing a metal oxide film includes injecting a reaction gas and metal precursors into a chamber, forming a first metal precursor film on a substrate in a plasma OFF state, forming a first sub-metal oxide film by oxidizing the first metal precursor film in a plasma ON state, and forming a second metal precursor film on the first sub-metal oxide film in the plasma OFF state, where the metal oxide film has an amorphous phase, a thickness of about 20 nanometer (nm) to about 130 nm, and a dielectric constant of about 10 to about 50.
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公开(公告)号：US20150259798A1
公开(公告)日：2015-09-17
申请号：US14444231
申请日：2014-07-28
Applicant: Samsung Display Co. Ltd.
Inventor： Choel Min JANG , In Kyo KIM , Suk Won JUNG , Myung Soo HUH
IPC: C23C16/455
CPC classification number: C23C16/45546 , C23C16/45502 , C23C16/45527 , C23C16/45548 , C23C16/45578 , C23C16/545
Abstract: An atomic layer deposition apparatus includes a first base plate on which a seat portion is defined to allow a substrate to be seated thereon, a second base plate disposed opposite to the first base plate, a first gas nozzle portion arranged on the second base plate, a second gas nozzle portion arranged on the second base plate to be spaced apart from the first gas nozzle portion and substantially parallel to the first gas nozzle portion, and a gas storage portion connected to the first gas nozzle portion and the second gas nozzle portion.
Abstract translation: 原子层沉积装置包括：第一基板，其上限定有用于使基板安置的座部的第一基板;与第一基板相对设置的第二基板;布置在第二基板上的第一气体喷嘴部; 第二气体喷嘴部分，布置在第二基板上以与第一气体喷嘴部分间隔开并且基本上平行于第一气体喷嘴部分;以及气体存储部分，连接到第一气体喷嘴部分和第二气体喷嘴部分。
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Patent Agency Ranking
公开(公告)号：US20250128519A1
公开(公告)日：2025-04-24
申请号：US18731080
申请日：2024-05-31
Applicant: Samsung Display Co., LTD.
Inventor： Lae Ho KIM , Yu KONTA , Myung Soo HUH , Jae Bum PAHK , Jai Hyuk CHOI
Abstract: An inkjet printing device includes: an inkjet head; an ink supply device connected to the inkjet head; a purge bath below the inkjet head, and connected to the ink supply device; a first channel connecting the purge bath and the ink supply device; and a densitometer in the first channel.
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公开(公告)号：US20230264475A1
公开(公告)日：2023-08-24
申请号：US17974633
申请日：2022-10-27
Applicant: Samsung Display Co., LTD.
Inventor： Jeong Won HAN , Jongho PARK , Taeho YANG , Myung Soo HUH
CPC classification number: B41J2/145 , B41J2/14 , B41J2/17503 , B41J2002/14362 , B41J2202/11
Abstract: An inkjet printing apparatus according to an embodiment includes a stage where a target substrate is disposed, and an inkjet head that discharges ink on the target substrate. The inkjet head includes a tank that stores the ink, nozzles that are provided on the tank and discharge the ink, and a damper that is disposed in the tank, and the damper comprises a protruding portion that protrudes toward the nozzles from the damper.
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公开(公告)号：US20230226824A1
公开(公告)日：2023-07-20
申请号：US18078059
申请日：2022-12-08
Applicant: Samsung Display Co., LTD.
Inventor： Jeong Won HAN , Myung Soo HUH
CPC classification number: B41J2/185 , B41J2/1652 , B41M5/0047 , H01L51/56 , B41J2002/1853 , H01L2251/56
Abstract: An inkjet device includes: a stage in which a substrate is installed; a substrate mover which moves the substrate in a first direction; a processor which moves in the first direction together with the substrate mover; and an inkjet head disposed on the stage, where the processor includes a suction portion.
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公开(公告)号：US20220246708A1
公开(公告)日：2022-08-04
申请号：US17725012
申请日：2022-04-20
Applicant: Samsung Display Co., Ltd.
Inventor： Myung Soo HUH , Dong Kyun KO , Sung Chul KIM , Woo Jin KIM , Cheol Lae ROH , Keun Hee PARK
Abstract: A method of manufacturing a metal oxide film includes injecting a reaction gas and metal precursors into a chamber, forming a first metal precursor film on a substrate in a plasma OFF state, forming a first sub-metal oxide film by oxidizing the first metal precursor film in a plasma ON state, and forming a second metal precursor film on the first sub-metal oxide film in the plasma OFF state, where the metal oxide film has an amorphous phase, a thickness of about 20 nanometer (nm) to about 130 nm, and a dielectric constant of about 10 to about 50.
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公开(公告)号：US20220080725A1
公开(公告)日：2022-03-17
申请号：US17420438
申请日：2019-03-13
Applicant: Samsung Display Co., LTD.
Inventor： Byung Chul LEE , Heung Cheol JEONG , Myung Soo HUH , Min Soo KIM , Jae Ha LIM
IPC: B41J2/045
Abstract: An inkjet printing device includes a stage part including a stage, an inkjet head part including at least one inkjet head that disposes an ink on the stage, the ink including dipoles and a solvent having the dipoles, a heat treatment device that removes the solvent, a first sensing part that measures a position of the ink disposed on the stage, a second sensing part that measures a position of the inkjet head, and a third sensing part that measures a position of each of the dipoles disposed on the stage. A dipole aligning method includes disposing an ink on a substrate, the ink including dipoles and a solvent having the dipoles, generating an electric field on the substrate and disposing the dipoles on the substrate by the electric field, removing the solvent, and measuring a position of each of the dipoles disposed on the substrate.
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