Invention Application
- Patent Title: DEEP LEARNING IMAGE DENOISING FOR SEMICONDUCTOR-BASED APPLICATIONS
-
Application No.: US17721300Application Date: 2022-04-14
-
Publication No.: US20220383456A1Publication Date: 2022-12-01
- Inventor: Aditya Gulati , Raghavan Konuru , Niveditha Lakshmi Narasimhan , Saravanan Paramasivam , Martin Plihal , Prasanti Uppaluri
- Applicant: KLA Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Priority: IN202141024096 20210531
- Main IPC: G06T5/00
- IPC: G06T5/00 ; G06T7/00 ; G06T5/50
Abstract:
Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem. The one or more components include a deep learning model configured for denoising an image of a specimen generated by an imaging subsystem. The computer subsystem is configured for determining information for the specimen from the denoised image.
Public/Granted literature
- US12299848B2 Deep learning image denoising for semiconductor-based applications Public/Granted day:2025-05-13
Information query
