Invention Application
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
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Application No.: US17735838Application Date: 2022-05-03
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Publication No.: US20220384449A1Publication Date: 2022-12-01
- Inventor: EUNJUNG KIM , HYO-SUB KIM , JAY-BOK CHOI , YONGSEOK AHN , JUNHYEOK AHN , KISEOK LEE , MYEONG-DONG LEE , YOONYOUNG CHOI
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0068170 20210527,KR10-2021-0112645 20210825
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device includes a device isolation pattern on a substrate and defining a first active section, a first storage node pad on the first active section, a word line in the substrate and extending across the first active section, a bit line on the first storage node pad and crossing over the word line, a storage node contact on one side of the bit line and adjacent to the first storage node pad, and an ohmic layer between the storage node contact and the first storage node pad. A bottom surface of the ohmic layer is rounded.
Information query
IPC分类: