- 专利标题: THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THE SAME
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申请号: US17459456申请日: 2021-08-27
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公开(公告)号: US20220384474A1公开(公告)日: 2022-12-01
- 发明人: Yuancheng Yang , Bingjie Yan , Di Wang , Cuicui Kong , Wenxi Zhou
- 申请人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 申请人地址: CN Wuhan
- 专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- 当前专利权人地址: CN Wuhan
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582
摘要:
A three-dimensional (3D) memory device includes a doped semiconductor layer, a stack structure, and a channel structure. The stack structure includes interleaved conductive layers and dielectric layers formed on the doped semiconductor layer. The conductive layers include a plurality of word lines, and a drain select gate line. The channel structure extends through the stack structure along a first direction and is in contact with the doped semiconductor layer. The drain select gate line includes a first dielectric layer in contact with the channel structure, and a first polysilicon layer in contact with the first dielectric layer.
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