Invention Application
- Patent Title: CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY
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Application No.: US17789979Application Date: 2020-12-28
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Publication No.: US20220388914A1Publication Date: 2022-12-08
- Inventor: Yukio MIURA , Nobuhiro HIDAKA , Jun ARIKAWA , Hironori KUGIMOTO
- Applicant: SUMITOMO OSAKA CEMENT CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee: SUMITOMO OSAKA CEMENT CO., LTD.
- Current Assignee Address: JP Tokyo
- Priority: JP2020-015794 20200131
- International Application: PCT/JP2020/049102 WO 20201228
- Main IPC: C04B37/00
- IPC: C04B37/00 ; H01L21/683 ; C04B35/117 ; C04B35/565 ; C04B41/50 ; C04B41/87 ; C04B41/89

Abstract:
A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; and a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3), a porosity at an interface between the pair of ceramic plates (2, 3) and the insulating layer (5) is 4% or less, and a ratio of an average primary particle diameter of an insulating material which forms the insulating layer (5) to an average primary particle diameter of an insulating material which forms the ceramic plates (2, 3) is more than 1.
Information query