公开(公告)号：US20240312769A1

公开(公告)日：2024-09-19

申请号：US18259385

申请日：2021-08-31

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Jun ARIKAWA ,  Nobuhiro HIDAKA ,  Yukio MIURA

IPC: H01J37/32 ,  H01L21/683

CPC classification number: H01J37/32715 ,  H01J37/32568 ,  H01L21/6833

Abstract: A ceramic joined body includes: a pair of ceramic plates; and an electrode layer and an insulating layer that are interposed between the pair of ceramic plates and, in which the insulating layer is formed of an insulating material and a conductive material.

公开(公告)号：US20180269097A1

公开(公告)日：2018-09-20

申请号：US15762056

申请日：2016-09-13

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Shinichi MAETA ,  Yukio MIURA ,  Mamoru KOSAKAI ,  Hitoshi KOUNO

IPC: H01L21/683 ,  H01J37/32

CPC classification number: H01L21/6833 ,  H01J37/32642 ,  H01J37/32724 ,  H01J2237/002 ,  H01J2237/334 ,  H01L21/67069 ,  H01L21/6831 ,  H01L21/68735 ,  H02N13/00

Abstract: An electrostatic chuck device according to the present invention includes: an electrostatic chuck portion having a placement surface on which a plate-like sample is placed; a base portion for temperature adjustment disposed in opposition to the side of the electrostatic chuck portion on the opposite side from the placement surface; a bonding portion for bonding the electrostatic chuck portion and the base portion for temperature adjustment together; and an annular focus ring surrounding the periphery of the placement surface, in which the volume of a space surrounded by the electrostatic chuck portion, the focus ring, the bonding portion, and a dam portion of the base portion for temperature adjustment is greater than the amount of volume expansion of the bonding portion at the working temperature.

公开(公告)号：US20170278738A1

公开(公告)日：2017-09-28

申请号：US15460647

申请日：2017-03-16

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Tomomi ITO ,  Yukio MIURA

IPC: H01L21/683 ,  H02N13/00

Abstract: An electrostatic chuck device includes: an electrostatic chuck section having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in electrostatic attracting internal electrode; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having gaps; a sheet material; and a base section having a function of cooling the electrostatic chuck section, in this order, in which each of the gaps of the pattern is filled with an inorganic filler composition which includes an inorganic filler and an adhesive.

公开(公告)号：US20220388914A1

公开(公告)日：2022-12-08

申请号：US17789979

申请日：2020-12-28

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Yukio MIURA ,  Nobuhiro HIDAKA ,  Jun ARIKAWA ,  Hironori KUGIMOTO

IPC: C04B37/00 ,  H01L21/683 ,  C04B35/117 ,  C04B35/565 ,  C04B41/50 ,  C04B41/87 ,  C04B41/89

Abstract: A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; and a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3), a porosity at an interface between the pair of ceramic plates (2, 3) and the insulating layer (5) is 4% or less, and a ratio of an average primary particle diameter of an insulating material which forms the insulating layer (5) to an average primary particle diameter of an insulating material which forms the ceramic plates (2, 3) is more than 1.

公开(公告)号：US20190019714A1

公开(公告)日：2019-01-17

申请号：US16070478

申请日：2017-01-18

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Mamoru KOSAKAI ,  Yukio MIURA ,  Kazunori ISHIMURA ,  Keisuke MAEDA ,  Hitoshi KOUNO ,  Yuuki KINPARA ,  Shinichi MAETA ,  Tomomi ITO

IPC: H01L21/683 ,  H01L21/67 ,  H02N13/00

Abstract: An electrostatic chuck device includes: an electrostatic chuck part which incorporates an internal electrode for electrostatic attraction and has a placing surface on which a plate-like sample is placed; a base part which cools the electrostatic chuck part; and an adhesion layer which bonds the electrostatic chuck part and the base part to integrate the parts together, in which a first through-hole is provided in the electrostatic chuck part, a second through-hole that communicates with the first through-hole is provided in the base part, a tubular insulator is fixed in the second through-hole, an annular sealing member is sandwiched between the electrostatic chuck part and a distal end surface of the insulator, wherein the distal end surface is located on the electrostatic chuck part side of the insulator, and a tubular insulating wall member is located at the inner side of the sealing member in the radial direction.

公开(公告)号：US20230043148A1

公开(公告)日：2023-02-09

申请号：US17790002

申请日：2020-12-28

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Nobuhiro HIDAKA ,  Yukio MIURA ,  Jun ARIKAWA ,  Hironori KUGIMOTO

IPC: H01L21/683 ,  C04B37/00

Abstract: A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

公开(公告)号：US20190088517A1

公开(公告)日：2019-03-21

申请号：US15528026

申请日：2015-11-19

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Mamoru KOSAKAI ,  Yukio MIURA

IPC: H01L21/683 ,  H02N13/00 ,  H01L21/67

Abstract: An aspect of the present invention has an object to provide an electrostatic chuck device which is provided with a plurality of divided heaters and in which uniform temperature control of a zone which is heated by each heater can be performed with a simple configuration. An electrostatic chuck device according to an aspect of the present invention includes: an electrostatic chuck part which has a mounting surface on one principal surface thereof to mount a plate-shaped sample and has an electrode for electrostatic attraction; a temperature controlling base part which is provided at a side opposite to the mounting surface of the electrostatic chuck part and is configured to cool the electrostatic chuck part; a high frequency generating electrode which is provided in a layer between the electrostatic chuck part and the temperature controlling base part; a high frequency power source which is connected to the high frequency generating electrode; a first heater element which is configured with a plurality of main heaters which are provided in a layer between the high frequency generating electrode and the temperature controlling base part; and a guard electrode which is provided in a layer between the high frequency generating electrode and the first heater element.

公开(公告)号：US20230386880A1

公开(公告)日：2023-11-30

申请号：US18029821

申请日：2021-08-31

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Jun ARIKAWA ,  Nobuhiro HIDAKA ,  Yukio MIURA

IPC: H01L21/683 ,  H01J37/32 ,  C04B37/00

CPC classification number: H01L21/6833 ,  H01J37/32715 ,  C04B37/003 ,  H01J2237/2007 ,  C04B2237/064 ,  C04B2237/083 ,  C04B2237/343 ,  C04B2237/68 ,  C04B2237/64

Abstract: A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.

公开(公告)号：US20190035668A1

公开(公告)日：2019-01-31

申请号：US16073506

申请日：2017-01-19

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Tomomi ITO ,  Yukio MIURA

IPC: H01L21/683 ,  H01L21/67

Abstract: An electrostatic chuck device includes: in order, an electrostatic chuck part having one principal surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a heating member bonded to a surface on the side opposite to the placing surface of the electrostatic chuck part in a pattern having gaps; a sheet material; and a base part having a function of cooling the electrostatic chuck part, in which a silicone resin sheet having a layer thickness of 10 μm or more and less than 200 μm and a Shore hardness (A) in a range of 10 to 70 is provided between the electrostatic chuck part and the heating member.

公开(公告)号：US20180068883A1

公开(公告)日：2018-03-08

申请号：US15558039

申请日：2016-02-18

Applicant: SUMITOMO OSAKA CEMENT CO., LTD.

Inventor： Tomomi ITO ,  Yukio MIURA

IPC: H01L21/683 ,  H02N13/00 ,  H01L21/67 ,  H01L21/687 ,  B32B7/12 ,  C09J183/04

Abstract: Provided is an electrostatic chuck device which includes: an electrostatic chuck section having one main surface serving as a placing surface on which a plate-shaped sample is placed, and having a built-in internal electrode for electrostatic attraction; a first adhesion layer which contains spacers and a silicone adhesive and in which a layer thickness D is in a range of 3 to 25 μm and a ratio (φS/D) between the layer thickness D and an average particle diameter φS of the spacers is in a range of 0.1 to 1.0; a plurality of heating members bonded to the surface on the side opposite to the placing surface of the electrostatic chuck section in a pattern having a gap with respect to one another by the first adhesion layer; a second adhesion layer which contains a silicone adhesive; and a base section having a function of cooling the electrostatic chuck section.