发明申请
- 专利标题: RESIST UNDERLAYER FILM-FORMING COMPOSITION CONTAINING INDOLOCARBAZOLE NOVOLAK RESIN
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申请号: US17880761申请日: 2022-08-04
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公开(公告)号: US20220404707A1公开(公告)日: 2022-12-22
- 发明人: Hikaru TOKUNAGA , Daigo SAITO , Keisuke HASHIMOTO , Rikimaru SAKAMOTO
- 申请人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 申请人地址: JP Tokyo
- 专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人: NISSAN CHEMICAL INDUSTRIES, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2015-235002 20151201
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C08G12/26 ; C09D161/26 ; C08G16/02 ; G03F7/20 ; G03F7/40
摘要:
A resist underlayer film for lithography does not cause intermixing with a resist layer, has high dry etching resistance and high heat resistance, and generates a low amount of sublimate. A resist underlayer film-forming composition containing a polymer having a unit structure of the following formula (1): wherein A is a divalent group having at least two amino groups, the group is derived from a compound having a condensed ring structure and an aromatic group for substituting a hydrogen atom on the condensed ring, and B1 and B2 are each independently a hydrogen atom, an alkyl group, a benzene ring group, a condensed ring group, or a combination thereof, or B1 and B2 optionally form a ring with a carbon atom bonded to B1 and B.
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