SALT, ACID GENERATOR, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Abstract:
Disclosed are a salt represented by formula (I), an acid generator, and a resist composition: wherein R1, R2 and R3 each represent a hydroxy group, *—O—R10, *—O-L10-CO—O—R10, etc.; L10 represents an alkanediyl group; R10 represents an acid-labile group; R4 to R9 each represent a halogen atom, a haloalkyl group, etc.; A1, A2 and A3 each represent a hydrocarbon group, etc.; m1 and m7 represent an integer of 0 to 5, m2 to m6, m8 and m9 represent an integer of 0 to 4, 0≤m1+m7≤5, 0≤m2+m8≤4, 0≤m3+m9≤4, and at least one of m1, m2 and m3 represents an integer of 1 or more; X4 represents a single bond, —CH2—, etc.; and Al− represents an organic anion.
Information query
Patent Agency Ranking
0/0