Invention Application
- Patent Title: SEMICONDUCTOR DEVICE
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Application No.: US17683460Application Date: 2022-03-01
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Publication No.: US20230011675A1Publication Date: 2023-01-12
- Inventor: Kyunghwan LEE , Yongseok KIM , Hyuncheol KIM , Jongman PARK , Dongsoo WOO
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR10-2021-0090249 20210709
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587 ; H01L27/11592

Abstract:
A semiconductor device includes first conductive lines provided on a substrate and spaced apart from each other in a first direction perpendicular to a top surface of the substrate, second conductive lines spaced apart from the first conductive lines in a second direction parallel to the top surface of the substrate, a gate electrode disposed between the first and second conductive lines and extended in the first direction, a plurality of channel patterns provided to enclose a side surface of the gate electrode and spaced apart from each other in the first direction, a ferroelectric pattern between each of the channel patterns and the gate electrode, and a gate insulating pattern between each of the channel patterns and the ferroelectric pattern. Each of the channel patterns is connected to a corresponding one of the first conductive lines and a corresponding one of the second conductive lines.
Information query
IPC分类: