Invention Publication
- Patent Title: ARENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS
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Application No.: US18097406Application Date: 2023-01-16
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Publication No.: US20230151038A1Publication Date: 2023-05-18
- Inventor: Andrea Leoncini , Paul Mehlmann , Nemanja Dordevic , Han Vinh Huynh , Doreen Wei Ying Yong
- Applicant: Applied Materials, Inc. , National University of Singapore
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.,National University of Singapore
- Current Assignee: Applied Materials, Inc.,National University of Singapore
- Current Assignee Address: US CA Santa Clara; SG Singapore
- The original application number of the division: US17146886 2021.01.12
- Main IPC: C07F11/00
- IPC: C07F11/00 ; C23C16/32 ; C23C16/40 ; C23C16/42 ; C23C16/18 ; C23C16/34

Abstract:
Molybdenum(0) coordination complexes comprising an arene ligand and one or more neutral ligands which coordinate to the metal center by carbon, nitrogen or phosphorous are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum nitride). The exposures can be sequential or simultaneous.
Public/Granted literature
- US12116376B2 Arene molybdenum (0) precursors for deposition of molybdenum films Public/Granted day:2024-10-15
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