Invention Publication
- Patent Title: GAS DIFFUSER HOUSINGS, DEVICES, AND RELATED METHODS
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Application No.: US17983907Application Date: 2022-11-09
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Publication No.: US20230151490A1Publication Date: 2023-05-18
- Inventor: Michael Addorisio , David McCrimmon , Virendra Warke , Devon Nichole Dion , Benjamin Schooler
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: C23C16/455
- IPC: C23C16/455 ; B29C64/153 ; B29C64/268
Abstract:
Described are directional gas diffuser devices and housing components thereof; systems that include the gas diffuser devices; methods of using the gas diffuser devices; and methods of manufacturing gas diffuser devices.
Information query
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