Invention Publication
- Patent Title: WAFER PLACEMENT TABLE
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Application No.: US17816006Application Date: 2022-07-29
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Publication No.: US20230154781A1Publication Date: 2023-05-18
- Inventor: Tatsuya KUNO , Seiya INOUE
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Nagoya-City
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya-City
- Priority: JP 21185369 2021.11.15 JP 22108438 2022.07.05
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32

Abstract:
A wafer placement table includes an alumina base that has a wafer placement surface on its upper surface, and incorporates an electrode; a brittle cooling base bonded to a lower surface of the alumina base; and a ductile connection member stored in a storage hole, opened in a lower surface of the cooling base, in a state of restricted axial rotation and in a state of engaging with an engagement section of the storage hole, the ductile connection member having a male thread section or a female thread section.
Public/Granted literature
- US12266557B2 Wafer placement table Public/Granted day:2025-04-01
Information query
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