- 专利标题: SEALED FORCE SENSOR WITH ETCH STOP LAYER
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申请号: US17860941申请日: 2022-07-08
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公开(公告)号: US20230016531A1公开(公告)日: 2023-01-19
- 发明人: Julius Minglin Tsai , Ryan Diestelhorst , Dan Benjamin
- 申请人: NextInput, Inc.
- 申请人地址: US CA San Jose
- 专利权人: NextInput, Inc.
- 当前专利权人: NextInput, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G01L1/18
- IPC分类号: G01L1/18 ; B81B3/00 ; B81C1/00 ; G01L1/26
摘要:
An example microelectromechanical system (MEMS) force sensor is described herein. The MEMS force sensor can include a sensor die configured to receive an applied force. The sensor die can include a first substrate and a second substrate, where a cavity is formed in the first substrate, and where at least a portion of the second substrate defines a deformable membrane. The MEMS force sensor can also include an etch stop layer arranged between the first substrate and the second substrate, and a sensing element arranged on a surface of the second substrate. The sensing element can be configured to convert a strain on the surface of the membrane substrate to an analog electrical signal that is proportional to the strain.
公开/授权文献
- US11965787B2 Sealed force sensor with etch stop layer 公开/授权日:2024-04-23
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