- 专利标题: ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE
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申请号: US17922780申请日: 2021-04-23
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公开(公告)号: US20230170179A1公开(公告)日: 2023-06-01
- 发明人: Yongxin WANG
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 国际申请: PCT/EP2021/060747 2021.04.23
- 进入国家日期: 2022-11-01
- 主分类号: H01J37/244
- IPC分类号: H01J37/244 ; G01N23/2206
摘要:
A detector includes a set of sensing elements, first section circuitry communicatively coupling a first set of sensing elements to an input of first signal processing circuitry, second section circuitry communicatively coupling a second set of sensing elements to an input of second signal processing circuitry, and interconnection circuitry communicatively coupling an output of the first signal processing circuitry to an output of the second signal processing circuitry. The interconnection circuitry may include an interconnection layer having interconnection switching elements communicatively coupled to outputs of analog signal paths of the detector. Interconnection switching elements may communicatively couple the outputs of adjacent analog signal paths. The detector may also include signal processing circuitry that includes a plurality of converters. The interconnection circuitry may be configured to selectively couple outputs of the first and second signal processing circuitry to the converters.
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