Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
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Application No.: US17933363Application Date: 2022-09-19
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Publication No.: US20230180458A1Publication Date: 2023-06-08
- Inventor: BEOM SEO KIM , Bo Ram GU , Ja Min KOO , Sung Gil KIM , Jong Hyeok KIM
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR SUWON-SI
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR SUWON-SI
- Priority: KR 20210174084 2021.12.07
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C5/06

Abstract:
A semiconductor memory device includes a substrate including an active area defined by an element separation layer, the active area including a first portion and second portions defined on both sides of the first portion a bit line crossing the active area and extending in a first direction on the substrate, and a bit line contact disposed between the substrate and the bit line and directly connected to the first portion of the active area. The bit line contact includes an indent area recessed into the substrate and an upper area on the indent area, a width of the indent area decreases as a distance from the bit line increases, the indent area includes a slope forming a boundary with the substrate and having a straight line shape, and a starting point of the slope of the indent area is lower than an upper surface of the element separation layer.
Information query
IPC分类: