Invention Publication
- Patent Title: SEMICONDUCTOR PROCESSING DEVICE WITH HEATER
-
Application No.: US18079247Application Date: 2022-12-12
-
Publication No.: US20230183863A1Publication Date: 2023-06-15
- Inventor: Shreyans Kedia , Dinkar Nandwana , Kyle Fondurulia , Todd Robert Dunn , Jereld Lee Winkler
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Main IPC: C23C16/455
- IPC: C23C16/455

Abstract:
The present disclosure pertains to embodiments of a semiconductor deposition reactor manifold which can be used to deposit semiconductor layers using processes such as atomic layer deposition (ALD). The semiconductor deposition reactor manifold comprising heater blocks with heater elements mounted on a manifold body. Advantageously, the heater blocks are detachably mounted for easy replacement.
Information query
IPC分类: