Invention Publication
- Patent Title: Spinning Disk with Electrostatic Clamped Platens for Ion Implantation
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Application No.: US17547623Application Date: 2021-12-10
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Publication No.: US20230187166A1Publication Date: 2023-06-15
- Inventor: Robert Mitchell , Frank Sinclair , Joseph C. Olson , William T. Weaver , Nick Parisi
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/317 ; H01L21/683 ; C23C14/48 ; C23C14/50

Abstract:
A system comprising a spinning disk is disclosed. The system comprises a semiconductor processing system, such as a high energy implantation system. The semiconductor processing system produces a spot ion beam, which is directed to a plurality of workpieces, which are disposed on the spinning disk. The spinning disk comprises a rotating central hub with a plurality of platens. The plurality of platens may extend outward from the central hub and workpieces are electrostatically clamped to the platens. The plurality of platens may also be capable of rotation. The central hub also controls the rotation of each of the platens about an axis orthogonal to the rotation axis of the central hub. In this way, variable angle implants may be performed. Additionally, this allows the workpieces to be mounted while in a horizontal orientation.
Public/Granted literature
- US12002649B2 Spinning disk with electrostatic clamped platens for ion implantation Public/Granted day:2024-06-04
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