- 专利标题: METHOD TO REDUCE BREAKDOWN FAILURE IN A MIM CAPACITOR
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申请号: US18067776申请日: 2022-12-19
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公开(公告)号: US20230187478A1公开(公告)日: 2023-06-15
- 发明人: Hsing-Lien Lin , Chii-Ming Wu , Chia-Shiung Tsai , Chung-Yi Yu , Rei-Lin Chu
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 分案原申请号: US16579738 2019.09.23
- 主分类号: H01L23/64
- IPC分类号: H01L23/64 ; H01L21/768 ; H01L21/02
摘要:
Various embodiments of the present application are directed towards a method for forming a metal-insulator-metal (MIM) capacitor comprising an enhanced interfacial layer to reduce breakdown failure. In some embodiments, a bottom electrode layer is deposited over a substrate. A native oxide layer is formed on a top surface of the bottom electrode layer and has a first adhesion strength with the top surface. A plasma treatment process is performed to replace the native oxide layer with an interfacial layer. The interfacial layer is conductive and has a second adhesion strength with the top surface of the bottom electrode layer, and the second adhesion strength is greater than the first adhesion strength. An insulator layer is deposited on the interfacial layer. A top electrode layer is deposited on the insulator layer. The top and bottom electrode layers, the insulator layer, and the interfacial layer are patterned to form a MIM capacitor.
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