Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME
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Application No.: US17884853Application Date: 2022-08-10
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Publication No.: US20230189524A1Publication Date: 2023-06-15
- Inventor: Min Gu KANG , Sang Don ZOO , Joon Sung KIM , Junghwan PARK , Seorim MOON , Seok Cheon BAEK , Cheol RYOU , Sun Young LEE , Cheol-Min LIM
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210177370 2021.12.13
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/535

Abstract:
A semiconductor memory device may include a substrate including a first and a second block region, and a stacked structure including insulating films and gate electrodes alternately stacked on the substrate. A vertical channel structure, a word line cut structure, and a block cut structure may penetrate the stacked structure. The word line cut structure may extend in a second direction. The block cut structure may extend in a first direction, connect to the word line cut structure, and define the first and second block regions. The block cut structure may include a first portion connected to the word line cut structure and a second portion connected to the first portion. From a planar viewpoint, the first portion may include at least a part not overlapping the second portion in the first direction and at least a region not overlapping the word line cut structure in the first direction.
Information query
IPC分类: