Invention Application
- Patent Title: INTEGRATED DUAL-PROBE RAPID IN-SITU SWITCHING MEASUREMENT METHOD AND DEVICE OF ATOMIC FORCE MICROSCOPE
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Application No.: US17757343Application Date: 2021-05-08
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Publication No.: US20230019239A1Publication Date: 2023-01-19
- Inventor: Lianqing LIU , Jialin SHI , Peng YU
- Applicant: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Shenyang, Liaoning
- Assignee: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
- Current Assignee: SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES
- Current Assignee Address: CN Shenyang, Liaoning
- Priority: CN202010973514.0 20200916
- International Application: PCT/CN2021/092279 WO 20210508
- Main IPC: G01Q60/38
- IPC: G01Q60/38 ; G01Q70/06 ; G01Q10/04 ; G01Q20/02

Abstract:
An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.
Public/Granted literature
- US11789037B2 Integrated dual-probe rapid in-situ switching measurement method and device of atomic force microscope Public/Granted day:2023-10-17
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