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公开(公告)号：US20230020068A1
公开(公告)日：2023-01-19
申请号：US17757328
申请日：2021-05-08
Inventor： Lianqing LIU , Jialin SHI , Peng YU
Abstract: A device capable of simultaneous independent motion measurement of multiple probes in an atomic force microscope includes at least two cantilever arms arranged in parallel. The end of each cantilever arm is provided with a needle tip. The surface of each cantilever arm is provided with a grating structure with a periodic distribution rule for reflecting laser irradiated on the grating structure and receiving the laser through reflected light detectors. The discrimination and motion measurement includes the steps of irradiating the measurement laser of different wavelengths on the back surfaces of multiple probes through the same light path at the same time, adopting the grating structures of different feature sizes as physical labels of the multiple probes and reflecting high-order reflected light of the laser of different wavelengths by the grating structures at different angles to separate the light path.
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公开(公告)号：US20230019239A1
公开(公告)日：2023-01-19
申请号：US17757343
申请日：2021-05-08
Inventor： Lianqing LIU , Jialin SHI , Peng YU
Abstract: An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.
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公开(公告)号：US20250076339A1
公开(公告)日：2025-03-06
申请号：US18294318
申请日：2023-03-09
Inventor： Lianqing LIU , Jialin SHI , Peng YU , Kaixuan WANG , Tie YANG , Yang YANG
Abstract: A scanning probe microscope based on high-speed instantaneous force control is used scan a sample, which includes steps of acquiring an acting force signal between a probe unit and a sample; calculating a real amplitude signal according to the acting force signal; acquiring a set amplitude signal; acquiring the first sinusoidal signal; obtaining a target acting force signal according to the real amplitude signal, the set amplitude signal and the first sinusoidal signal; and scanning the surface of the sample in a target sample scanning mode according to the target acting force signal, wherein the target sample scanning mode represents the operating mode of scanning the surface of the sample under the indication of the target acting force signal. The method solves the problems of low peak force tapping frequency and limited scanning range, and realizes high-speed instantaneous force tapping and mechanical property measurement while ensuring the scanning range.
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