Invention Publication

RAMAN MICROSCOPE
Abstract:
In a Raman microscope, a depth measurement processor performs depth measurement by changing a focal position of laser light along a depth direction of a sample which is an irradiation direction of the laser light with respect to the sample, and meanwhile, acquiring a Raman spectrum of the sample at a plurality of points in the depth direction. The display processor causes Raman spectra obtained at the plurality of points by the depth measurement to be displayed. The display processor can display a surface image of the sample on the stage and a depth image representing a plurality of points in the depth direction and causes, in a case where at least one point of the plurality of points in the depth image is selected, the Raman spectrum corresponding to the at least one point to be displayed.
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