- 专利标题: BUFFER UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
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申请号: US18063410申请日: 2022-12-08
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公开(公告)号: US20230195001A1公开(公告)日: 2023-06-22
- 发明人: Jong Kook Bae , Tae Won Yun , Chang Ho Kim , Hyun Yang Jeong , Sung Hun Eom
- 申请人: Semes Co., Ltd.
- 申请人地址: KR Cheonan-si
- 专利权人: Semes Co., Ltd.
- 当前专利权人: Semes Co., Ltd.
- 当前专利权人地址: KR Cheonan-si
- 优先权: KR 20210182934 2021.12.20
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
Disclosed are a buffer unit, in which a plurality of support plates is stacked in a vertical direction and a connection block is provided between the plurality of support plates to prevent vibration generated at the lower end of the support plate from being transmitted from the upper support plate, and a substrate treating apparatus. According to the present invention, it is possible to reduce the vibration generated in the buffer unit, so that there is an effect of improving the efficiency of the substrate treating process.
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