Invention Publication
- Patent Title: MANUFACTURING EQUIPMENT PARTS QUALITY MANAGEMENT SYSTEM
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Application No.: US17558510Application Date: 2021-12-21
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Publication No.: US20230195061A1Publication Date: 2023-06-22
- Inventor: Milind Jayram Gadre , Vivek Bharat Shah
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G05B13/04
- IPC: G05B13/04 ; G05B19/18 ; G05B13/02

Abstract:
A method includes receiving first data indicative of a range of values of a quality parameter of a type of manufacturing chamber component. Each value in the range of values meets one or more threshold criteria. The method further includes providing the first data to a physics-based model of a manufacturing chamber. The method further includes receiving, from the physics-based model, second data indicating a relationship between values of the quality parameter and predicted conditions in the manufacturing chamber. The method further includes determining, based on the relationship between values of the quality parameter and the predicted conditions, whether a new manufacturing chamber component of the manufacturing chamber component type is to be installed in the manufacturing chamber.
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