Invention Publication
- Patent Title: METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
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Application No.: US18181395Application Date: 2023-03-09
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Publication No.: US20230215686A1Publication Date: 2023-07-06
- Inventor: Dirk Zeidler , Gregor Dellemann , Gunther Scheunert
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Priority: DE 2018124044.9 2018.09.28
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/28

Abstract:
A method for operating a multi-beam particle beam microscope includes: scanning a multiplicity of particle beams over an object; directing electron beams emanating from impingement locations of the particle beams at the object onto an electron converter; detecting first signals generated by impinging electrons in the electron converter via a plurality of detection elements of a first detection system during a first time period; detecting second signals generated by impinging electrons in the electron converter via a plurality of detection elements of a second detection system during a second time period; and assigning to the impingement locations the signals which were detected via the detection elements of the first detection system during the first time period, for example on the basis of the detection signals which were detected via the detection elements of the second detection system during the second time period.
Public/Granted literature
- US12094683B2 Method for operating a multi-beam particle beam microscope Public/Granted day:2024-09-17
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