发明公开
- 专利标题: MEMS Gyroscope
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申请号: US17873195申请日: 2022-07-26
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公开(公告)号: US20230228569A1公开(公告)日: 2023-07-20
- 发明人: Zhao Ma , Zhan Zhan , Shan Yang , Xiao Kan , Shitao Yan , Yang Li , Hongtao Peng , Kahkeen Lai , Veronica Tan , Yan Hong
- 申请人: AAC Kaitai Technologies (Wuhan) CO., LTD
- 申请人地址: CN Wuhan
- 专利权人: AAC Kaitai Technologies (Wuhan) CO., LTD
- 当前专利权人: AAC Kaitai Technologies (Wuhan) CO., LTD
- 当前专利权人地址: CN Wuhan
- 优先权: CN 2210061281.6 2022.01.19
- 主分类号: G01C19/5712
- IPC分类号: G01C19/5712
摘要:
The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.
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