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公开(公告)号：US12130139B2
公开(公告)日：2024-10-29
申请号：US17875387
申请日：2022-07-27
发明人： Zhao Ma , Zhan Zhan , Xiao Kan , Shan Yang , Shitao Yan , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5747
CPC分类号： G01C19/5747
摘要： A MEMS gyroscope for three-axis detection relates to the technical field of gyroscope and includes a substrate, a sensing unit elastically connected with the substrate, and a driving unit coupled with the sensing unit and driving the sensing unit to move. The substrate includes anchor point structures respectively located at four corners of the substrate and four coupling structures respectively elastically connected with the four anchor point structures. An avoiding space is formed between two adjacent coupling structures. The driving unit includes two driving pieces separately elastically connected with adjacent coupling structures. The two driving pieces are symmetrically arranged and are frame-shaped. The sensing unit includes four X and Y mass blocks, two Z mass blocks elastically connected with the driving pieces, and two decoupling mass blocks. The two decoupling mass blocks are elastically connected. The MEMS gyroscope is differentially driven, which realizes differential detection and reduces quadrature error.
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公开(公告)号：US20240271932A1
公开(公告)日：2024-08-15
申请号：US18324178
申请日：2023-05-26
发明人： Shan Yang , Xiao Kan , Zhan Zhan , Shitao Yan , Zhao Ma , Hongtao Peng , Houming Chong , Zaixiang Pua , Kahkeen Lai , Veronica Tan , Yang Li
IPC分类号： G01C19/00 , G01C19/574
CPC分类号： G01C19/005 , G01C19/574
摘要： The present invention provides an MEMS gyroscope and an electronic product. The MEMS gyroscope comprises a plurality of first mass blocks, a second mass block and coupling parts, wherein the plurality of first mass blocks are located at two opposite sides of the second mass block in a first direction; and each coupling part comprises a coupling link and a plurality of connecting beams connected to two ends of the coupling link, the connecting beams are flexible beams, and the coupling part is positioned between the first mass blocks and the second mass block and connects the first mass blocks with the second mass block. Through the arrangement of the coupling links, strong coupling can be realized between the first mass blocks and the second mass block, so that the anti-interference performance of the MEMS gyroscope is enhanced during work and the working stability is improved.
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公开(公告)号：US12038282B2
公开(公告)日：2024-07-16
申请号：US17873154
申请日：2022-07-26
发明人： Shan Yang , Hongtao Peng , Zhan Zhan , Shitao Yan , Zhao Ma , Xiao Kan , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： A MEMS single-axis gyroscope includes an anchor point structure, a sensing unit elastically connected with the anchor point structure, and a driving decoupling structure elastically connected with the anchor point structure and the sensing unit. The sensing unit includes a plurality of mass blocks arranged side by side and rocker connecting pieces. Each of the rocker connecting pieces is connected between corresponding two adjacent mass blocks. Connecting positions between each of the rocker connecting pieces and the corresponding two adjacent mass blocks are located on a same side of the line connecting the centers of the plurality of mass blocks. The MEMS single-axis gyroscope is able to perform differential detection, which resists interference of external electrical and mechanical noise, and improves a signal-to-noise ratio. By adjusting the rocker connecting pieces arranged between each two adjacent mass blocks, a total vector displacement of the plurality of mass blocks is zero.
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公开(公告)号：US20230228569A1
公开(公告)日：2023-07-20
申请号：US17873195
申请日：2022-07-26
发明人： Zhao Ma , Zhan Zhan , Shan Yang , Xiao Kan , Shitao Yan , Yang Li , Hongtao Peng , Kahkeen Lai , Veronica Tan , Yan Hong
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： The invention discloses a MEMS gyroscope, including a substrate, a first unit and a second unit, and the first unit and the second unit are relatively arranged on the substrate along the first direction. The first unit is connected to the second unit through a coupling spring, and the substrate is also provided with a driving electrode and a detection electrode. The first unit includes a first weight and a second weight. The second unit includes the third weight and the fourth weight set oppositely along the second direction. The second set of coupling structures are connected to the third weight and fourth weight. Compared with the prior art, the beneficial effect of the present invention is that the MEMS gyroscope adopts a symmetrical layout, which facilitates the realization of differential detection and improves the sensitivity.
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公开(公告)号：US12050105B2
公开(公告)日：2024-07-30
申请号：US17873193
申请日：2022-07-26
发明人： Shan Yang , Zhan Zhan , Shitao Yan , Zhao Ma , Xiao Kan , Hongtao Peng , Yan Hong , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5733
CPC分类号： G01C19/5733
摘要： A MEMS gyroscope includes an anchor point, a resonator, and a transducer. The resonator includes eight resonating blocks arranged at equal intervals and a coupling beam connecting each two adjacent resonating blocks. The resonating blocks are connected with the anchor point through anchoring beams. The anchoring beams decouple radial motion and circumferential motion of the resonating blocks. The resonating blocks include first resonating blocks, second resonating blocks, third resonating blocks, and fourth resonating blocks. In a vibration mode, the transducer drives the first and second resonating blocks to vibrate along a first axis and a second axis respectively, so the third and fourth resonating blocks are driven to vibrate along the fourth axis and the third axis respectively. In a detection mode, the transducer detects vibration of the third resonating blocks along the third axis and the vibration of the fourth resonating blocks along the fourth axis.
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公开(公告)号：US12013414B2
公开(公告)日：2024-06-18
申请号：US17879813
申请日：2022-08-03
发明人： Shitao Yan , Zhan Zhan , Shan Yang , Zhao Ma , Xiao Kan , Hongtao Peng , Yang Li , Veronica Tan , Yan Hong , Kahkeen Lai
IPC分类号： G01P15/125 , G01P15/08 , G01P15/18
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P2015/0848 , G01P2015/086
摘要： A MEMS accelerometer includes a base, proof mass, at least one pair of seesaw structures, and an out-of-plane displacement detection component. The at least one pair of the seesaw structures are oppositely disposed and fixed on the base through anchor points, and the out-of-plane displacement detection component is configured to detect rotation of the at least one pair of the seesaw structures or out-of-plane linear motion of the proof mass. Linear displacement of the MEMS accelerometer is not only beneficial to improve linearity of a capacitive displacement detection, but also to other non-capacitive detection methods, such as optical displacement detection. In addition, a double coupling structure is adopted to jointly couple rotation of seesaws, and remaining translational and rotational modes of the seesaw structures are suppressed.
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公开(公告)号：US20240093996A1
公开(公告)日：2024-03-21
申请号：US18088826
申请日：2022-12-27
发明人： Zhao Ma , Shitao Yan , Zhan Zhan , Xiao Kan , Shan Yang , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5712
CPC分类号： G01C19/5712
摘要： Provided is a fully decoupled MEMS gyroscope, including an anchor point unit, a sensing unit elastically connected to the anchor point unit, and a driving unit configured to drive the sensing unit to move. The anchor point unit includes a center anchor point subunit located at a center of a rectangle and four side anchor points. The driving unit includes four driving members located on four sides of the rectangle. The sensing unit includes two X mass blocks symmetrically arranged in two avoiding intervals, two Y mass blocks symmetrically arranged in the other two avoiding intervals, four Z mass blocks respectively located at an outer side of each driving member, and four Z detection decoupling members respectively located at an outer side of each Z mass block. The X mass blocks and the Y mass blocks are respectively connected to each side anchor point.
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公开(公告)号：US11879907B2
公开(公告)日：2024-01-23
申请号：US17879814
申请日：2022-08-03
发明人： Shitao Yan , Zhan Zhan , Shan Yang , Zhao Ma , Hongtao Peng , Xiao Kan , Yang Li , Kahkeen Lai , Yan Hong , Veronica Tan
IPC分类号： G01P15/125 , G01P15/093 , G01P15/18 , G01P15/08
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/093 , G01P15/18
摘要： The invention provides an acceleration sensor, including a sensing unit, a sensing unit includes a ring-shaped outer coupling unit; seesaw structures, including at least two and arranged on an inner side of the outer coupling unit; an inner coupling unit, including an inner coupling elastic beam connecting two adjacent seesaw structures; proof mass blocks fixed on the outer coupling unit or the inner coupling unit or the seesaw structures; an in-plane coupling elastic member elastically connecting the seesaw structures to the outer coupling unit; in-plane displacement detection devices arranged on the proof mass blocks and configured to detect movements of the proof mass blocks along the first direction and/or along the second direction; and out-of-plane displacement detection devices arranged on the outer coupling unit and/or the seesaw structures and/or the inner coupling unit configured to detect movements of the seesaw structures along the third direction.
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公开(公告)号：US20230266124A1
公开(公告)日：2023-08-24
申请号：US17873125
申请日：2022-07-25
发明人： Zhao Ma , Zhan Zhan , Xiao Kan , Shan Yang , Shitao Yan , Hongtao Peng , Yang Li , Kahkeen Lai , Veronica Tan
IPC分类号： G01C19/5733 , G01C19/5769
CPC分类号： G01C19/5733 , G01C19/5769
摘要： A MEMS gyroscope includes an anchor point unit, a sensing unit elastically connected with the anchor point unit, and a driving unit elastically connected with the anchor point unit and the sensing unit. The anchor point unit includes four corner anchor point structures arranged at four corners of the MEMS gyroscope and four central anchor points. The sensing unit includes four first mass blocks elastically connected with the corner anchor point structures and the central anchor points to form avoiding spaces, four second mass blocks arranged within the avoiding spaces, and four decoupling mass blocks. The driving unit includes four driving pieces respectively connected with outer sides of the second mass blocks. The MEMS gyroscope realizes independent detection of angular velocities of three axes and realizes differential detection and balance of vibration moment, which immune to influence of acceleration shock and quadrature error and improves detection accuracy.
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公开(公告)号：US20240271934A1
公开(公告)日：2024-08-15
申请号：US18313350
申请日：2023-05-07
发明人： Zhao Ma , Xiao Kan , Shitao Yan , Shan Yang , Zhan Zhan , Yang Li , Veronica Tan , Kahkeen Lai
IPC分类号： G01C19/5747 , G01C19/5769
CPC分类号： G01C19/5747 , G01C19/5769
摘要： The present disclosure provides a micro-mechanical gyroscope and an electronic product. The micro-mechanical gyroscope includes first mass blocks, second mass blocks, a first driving member, a second driving member, first coupling components and second coupling components. The second mass blocks, the first driving member and the second driving member are arranged between the first mass blocks. The second mass blocks are arranged on either sides of the first second driving members. A first mass block arranged on a side of the first driving member is connected to the first driving member through a first coupling component, and a first mass block arranged on a side of the second driving member is connected to the second driving member through a first coupling component. Ends of the second mass block in the first direction are connected to the first driving member and the second driving member, respectively, through the second coupling components.
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