- 专利标题: SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SEMICONDUCTOR MEMORY DEVICE
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申请号: US18115544申请日: 2023-02-28
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公开(公告)号: US20230232630A1公开(公告)日: 2023-07-20
- 发明人: Nam Jae LEE
- 申请人: SK hynix Inc.
- 申请人地址: KR Icheon-si Gyeonggi-do
- 专利权人: SK hynix Inc.
- 当前专利权人: SK hynix Inc.
- 当前专利权人地址: KR Icheon-si Gyeonggi-do
- 优先权: KR 20200116060 2020.09.10
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H10B41/10 ; H10B41/27 ; H10B41/40 ; H10B43/10 ; H10B43/40
摘要:
A semiconductor memory device, and a method of manufacturing the semiconductor memory device, includes a gate stack including interlayer insulating layers and word lines alternately stacked in a first direction, channel pillars passing through the gate stack and tapering toward the first direction, source select lines surrounding the channel pillars and extending to overlap the gate stack, and a source isolation insulating layer overlapping the gate stack between the source select lines and tapering toward a direction opposite to the first direction.
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